Two-Port Piezoelectric Silicon Carbide MEMS Cantilever Resonator

A two-port silicon carbide single-clamped beam (cantilever) microelectromechanical system (MEMS) resonant device actuated piezoelectrically and sensed piezoelectrically has been designed, fabricated and tested. Lead zirconium titanate (PZT) has been used as active material to implement the piezoelectric actuator and sensor. Piezoelectric electrodes have been placed on the top of the single 3C-SiC beam forming a flexural-mode resonator. Operation has been demonstrated with two-port measurements of the transmission frequency response. The 250-μm long device resonates at 371 kHz with Q factor of 385 in atmospheric conditions. The tuning of the resonant frequency has been demonstrated by applying DC bias voltage in the range 0 V – 10 V and frequency tuning range of 1025 ppm has been achieved.